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Fast-scan single particle inductively coupled plasma mass spectroscopy extends nanoparticle metrology by 5X to < 50 ppt.
NMS Featured Publication: Fast-scan single particle inductively coupled plasma mass spectroscopy extends nanoparticle metrology by 5X to < 50 ppt.
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Promising PFC replacement etch chemistries were identified for etching C-doped silica and magnetic materials (Co, Fe, and Ni).
NMS Featured Publication: Non-PFC Plasma Chemistries for Patterning Complex Materials and Structures
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Use of displacing adjuvants in a ZnO ALD process shows promising path to selective deposition on dielectrics versus copper.
NMS Featured Publication: Initial Report on Selective ALD Using Displacement Method
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Patterning experiments on 300 mm wafers provide material/process guidelines for low defect DSA in high volume manufacturing.
NMS Featured Publication: Scale-up of a Chemo-Epitaxy Flow for Feature Multiplication Using Directed Self-Assembly of Block-Copolymers
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Monte Carlo, coarse grained simulations establish the material parameters to orient BCP domains when using a polymeric topcoat.
NMS Featured Publication: Controlling the Orientation of Block Polymer Domains by Using Polymeric Topcoats
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Mueller matrix ellipsometry-based scatterometry was used to measure the CD and line shape of DSA BCP patterns having 28 nm pitch.
NMS Featured Publication: Midyear Report for Year 2 of Advanced Linear and Non-Linear Optical CD Metrology
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Data of 5-nm sharp contacts on Si support researchers' predictions of reversed rectification behavior may enable new TFET design.
DS Featured Publication: Report on Benchmark Data of the New Technology
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TxACE researchers develop a technique to analyze the stability of on-chip voltage regulation for clean power domains.
ICSS Featured Publication: Report on Stability-Driven Design of Networked Voltage Regulators
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A new approach to MEMS testing allows physical stimuli to be replaced by electrical stimuli.
CADTS Featured Publication: Report on Correlation of Electrical and Physical Stimuli
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Professor Verma Receives AFOSR's Young Investigator Program Award
Prof. Naveen Verma received the 2014 Air Force Office of Scientific Research (AFOSR) Young Investigator Program (YIP) Award. The award is open to research scientists and engineers who received their degree in the last five years who show exceptional promise in their field. Prof. Verma received the award for his proposal "From Sensor Data to High-value Information: Ultra-low-energy Platforms for Deriving Inferences from Complex Embedded Signals."
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Naveen Verma Received AFOSR Young Investigator Research Program Award
Professor Naveen Verma received the Air Force Office of Scientific Research Young Investigator Research Program Award for his anticipated research, “From Sensor Data to High-value Information: Ultra-Low-Energy Platforms for Deriving Inferences from Complex.
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John Rogers Awarded American Ingenuity Award, Smithsonian Magazine
Professor John Rogers was awarded the 2013 American Ingenuity Award by Smithsonian Magazine. He was honored for his invention of ultra-thin silicon electronics that dissolve in the body or environment.
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Spin Filtering at a Mott Insulator / Band Insulator Tunnel Junction
Magnetotunneling properties are investigated by the research group of Prof. Suman Datta (Penn State) for a heterostructure tunnel junction between a Mott insulator (GdTiO3) with ferromagnetic behavior and a nonferromagnetic band insulator (SrTiO3). The complex-oxide heterostructure was synthesized using hybrid MBE by Prof. Susanne Stemmer’s group (UC Santa Barbara).
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Two-dimensional Heterojunction Interlayer Tunnel-Field Effect Transistor (Thin-TFET)
The research group of Prof. Grace Xing at Notre Dame proposed the idea of Thin-TFETs to achieve extremely small subthreshold swing for low-energy system applications. The electrostatics properties and electron transport of the Thin-TFET have been studied. The result suggests the excellent steepness and reasonable ON-current of the Thin-TFET. (available on arXiv and to appear in JAP).
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Michigan Micro Motes
A prototype for tiny, self-sufficient, spying, collecting and reporting computers have been developed by TerraSwarm researchers at the University of Michigan. These millimeter-scale computing systems, called "Michigan Micro Motes", integrate sensors that can measure light, pressure, and temperature and can communicate wirelessly and harvest energy autonomously.
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