Questions?
[x] GRC Science Area
NMS – Nanomanufacturing Sciences

Content Type
Patent Filings 37
Events 17

SRC Program
GRC 51
SRC 3
FCRP 2

Year
2016 2
2012 4
2011 2
2010 9

Center
EBSM 6
FENA 5
C2S2 3
GSRC 3
IFC 3
MSD 3
MuSyC 2
NPT 1
TxACE 1

Thrust/Theme
PAT – Patterning 28
ESH – Environment Safety and Hea... 5
CFM&TCM – CFM & Total Chemical M... 3
MTMP – Metrology Tools Matls & P... 2
Masks 2
NEM – Nanoengineered Materials 1
Pat(MPS) – Patterning 1
PatMat – Patterning Materials 1

1 through 30 of 54 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 next >>
1: Materials and Methods for Creating Imaging Layers (Patent P1140...
Materials and Methods for Creating Imaging Layers Application Type: Continuation Patent Number: 7851252 Country: United States Status: Filed on 17-Feb-2009, Issued on 14-Dec-2010, ...
URL: https://www.src.org/library/patent/p1140/
Modified: 2010-12-14 - 26KB
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2: Materials and Methods for Creating Imaging Layers (Patent P1002...
Materials and Methods for Creating Imaging Layers Application Type: European Patent Office Patent Number: 06251517.6 Status: Filed on 22-Mar-2006, Issued on 13-Oct-2009 ...
URL: https://www.src.org/library/patent/p1002/
Modified: 2009-10-13 - 26KB
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3: Materials and Methods for Creating Imaging Layers (Patent P0626...
Materials and Methods for Creating Imaging Layers Application Type: Utility Patent Number: 7514764 Country: United States Status: Filed on 21-Mar-2006, Issued on 7-Apr-2009 ...
URL: https://www.src.org/library/patent/p0626/
Modified: 2009-04-07 - 26KB
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4: pdfSlide 1
ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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5: Methods and Compositions for Forming Patterns with Isolated or...
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Coplymer Materials Application Type: Divisional Patent Number: 8501304 Country: United ...
URL: https://www.src.org/library/patent/p1333/
Modified: 2013-08-06 - 25KB
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6: Methods and Compositions for Forming Patterns with Isolated or...
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Copolymer Materials Application Type: Utility Patent Number: 8133534 Country: United ...
URL: https://www.src.org/library/patent/p1043/
Modified: 2012-03-13 - 25KB
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7: DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK...
DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY Application Type: Patent Cooperation Treaty Patent Number: 10438626 Status: Filed on ...
URL: https://www.src.org/library/patent/p1132/
Modified: 2010-04-17 - 26KB
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8: Density Multiplication and Improved Lithography by Directed Block...
Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly Application Type: Utility Patent Number: 9183870 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1116/
Modified: 2015-11-10 - 26KB
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9: TECHCON 2011 (Event E004113) - SRC
TECHCON 2011 Date: Monday, Sept. 12, 2011, 8 a.m. - Tuesday, Sept. 13, 2011, 10 p.m. CT Location: Renaissance Austin Hotel, Austin, TX, United States Event ID: E004113 E004113 ...
URL: https://www.src.org/calendar/e004113/
Modified: 2012-03-13 - 97KB
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10: pdfSlide 1
230 250 270 290 310 0 0 0 0 0 0 0 0 1 2 240 260 280 300 V G (mV) V G (mV) I (nA) V SD = - 30 mV The absence of steps the sequential nature coupling of the atom. Figure 4b shows ...
URL: https://www.src.org/calendar/e004100/e004100-00-session3.pdf
Modified: 2010-11-29 - 29.2MB
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11: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: Foreign National Patent Number: 5377857 Country: Japan Status: Filed on 22-Nov-2005, ...
URL: https://www.src.org/library/patent/p1025/
Modified: 1995-01-03 - 27KB
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12: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: European Patent Office Patent Number: PCT/US20050425 Status: Filed on 22-Nov-2005, Issued ...
URL: https://www.src.org/library/patent/p1024/
Modified: 2007-08-08 - 26KB
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13: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: Utility Patent Number: 8287957 Country: United States Status: Filed on 22-Nov-2005, ...
URL: https://www.src.org/library/patent/p0517/
Modified: 2012-10-16 - 27KB
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14: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Divisional Patent Number: 6566030 Country: United ...
URL: https://www.src.org/library/patent/p0224/
Modified: 2003-05-20 - 23KB
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15: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Utility Patent Number: 6376149 Country: United ...
URL: https://www.src.org/library/patent/p0088/
Modified: 2002-04-23 - 23KB
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16: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1340/
Modified: 2014-01-07 - 27KB
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17: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials on Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1446/
Modified: 2017-01-10 - 27KB
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18: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Utility Patent ...
URL: https://www.src.org/library/patent/p0603/
Modified: 2012-05-01 - 27KB
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19: Methods and Systems for Transmission and Detection of Free Radicals...
Methods and Systems for Transmission and Detection of Free Radicals Application Type: Utility Patent Number: 11592394 Country: United States Status: Filed on 14-Aug-2017, Issued on ...
URL: https://www.src.org/library/patent/p2131/
Modified: 2023-12-28 - 22KB
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20: Organoelement Resists for EUV Lithography and Methods of Making...
Organoelement Resists for EUV Lithography and Methods of Making the Same Application Type: Utility Patent Number: 7326514 Country: United States Status: Filed on 12-Mar-2004, ...
URL: https://www.src.org/library/patent/p0446/
Modified: 2008-02-05 - 22KB
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21: pdfMicrosoft Word - Executive Summary [Koji INOUE][1].doc
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley ) 50nm n-MOS p-MOS X Y Z Fig. 1. 3D elemental maps of full sections of ...
URL: https://www.src.org/...004100-07-executive-summary-inoue.pdf
Modified: 2010-11-09 - 1.3MB
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22: TECHCON 2012 (Event E004114) - SRC
TECHCON 2012 Date: Monday, Sept. 10, 2012, 8 a.m. - Tuesday, Sept. 11, 2012, 10 p.m. CT Location: Renaissance Austin Hotel, Austin, TX, United States Event ID: E004114 E004114 ...
URL: https://www.src.org/calendar/e004114/
Modified: 2013-03-11 - 98KB
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23: Stress-Free Mount for Imaging Mask (Patent P0056) - SRC
Stress-Free Mount for Imaging Mask Application Type: Divisional Patent Number: 5675403 Country: United States Status: Filed on 28-May-1996, Issued on 7-Oct-1997, Patent Expired ...
URL: https://www.src.org/library/patent/p0056/
Modified: 1997-10-07 - 24KB
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24: Stress-Free Mount for Imaging Mask (Patent P0076) - SRC
Stress-Free Mount for Imaging Mask Application Type: Utility Patent Number: 5536559 Country: United States Status: Filed on 22-Nov-1994, Issued on 16-Jul-1996, Patent Expired ...
URL: https://www.src.org/library/patent/p0076/
Modified: 1996-07-16 - 24KB
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25: Molecular Transfer Printing Using Block Copolymers (Patent P1163...
Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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26: Molecular Transfer Printing Using Block Copolymers (Patent P1181...
Molecular Transfer Printing Using Block Copolymers Application Type: Patent Cooperation Treaty Patent Number: PCT/US20090392 Status: Filed on 14-May-2009, Issued on 26-Feb-2011, ...
URL: https://www.src.org/library/patent/p1181/
Modified: 2011-02-26 - 26KB
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27: Directed Assembly of Triblock Copolymers (Patent P0617) - SRC
Directed Assembly of Triblock Copolymers Application Type: Utility Patent Number: 8618221 Country: United States Status: Filed on 12-Oct-2006, Issued on 31-Dec-2013 Organization: ...
URL: https://www.src.org/library/patent/p0617/
Modified: 2013-12-31 - 22KB
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28: System and Method Converting the Polarization State of an Optical...
System and Method Converting the Polarization State of an Optical Beam into an Inhomogenously Polarized State Application Type: Utility Patent Number: 7414786 Country: United ...
URL: https://www.src.org/library/patent/p0496/
Modified: 2008-08-19 - 24KB
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29: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Site Review Date: Wednesday, March 9, 2011, 8 a.m. - Friday, March 11, 2011, 5 p.m. ...
URL: https://www.src.org/calendar/e003989/
Modified: 2011-09-11 - 73KB
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30: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Tuesday, March 20, 2012, 4 p.m. - Thursday, March 22, 2012, 2 p.m. MT ...
URL: https://www.src.org/calendar/e004390/
Modified: 2012-09-22 - 78KB
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1 through 30 of 54 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 next >>