ESH
Environment, Safety, and Health

Kashyap Yellai, Program Manager

Exploration of greener material and process pathways is critically important in enabling environmentally friendly and sustainable manufacturing solutions for future semiconductor devices consists of three main stages – wafer manufacturing, fabrication, and packaging/testing.

Upcoming Events

Date Event Summary
11 July 2024
GRC
GRC
ESH e-Workshop: Experimental Evaluation of Degradation Rates and Transformation Products of Fluorinated Polymers used During Semiconductor Manufacturing
Thursday, July 11, 2024, 11 a.m.–noon ET
Durham, NC, United States
This will also include Targeted Sampling and Analysis to Support Source Tracking and Mass Balances of Organofluorine-Containing Compounds in Semiconductor Manufacturing Facilities
E-Workshop
19 September 2024
GRC
GRC
NMP e-Workshop: Quasi-2D Materials for Ultra-low Resistance Interconnects
Thursday, Sept. 19, 2024, 8 p.m.–9 p.m. ET
Durham, NC, United States

E-Workshop

Past Events

Date Event Summary
3–7 June 2024
GRC
GRC
Combined ESH/PKG Annual Review
Monday, June 3, 2024 — Friday, June 7, 2024
Chandler, AZ, United States

24 May 2024
GRC
GRC
ESH e-Workshop: Reaction Kinetics for the Incineration of Fluorinated Organic Chemicals
Friday, May 24, 2024, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
14 May 2024
GRC
GRC
NMP e-Workshop: Gas Phase Methods for Selective Thermal Atomic Layer Etching of Si-Based Materials
Tuesday, May 14, 2024, 11 a.m.–noon ET
Durham, NC, United States

E-Workshop
25 March 2024
GRC
GRC
2024 PI Onboarding Webinar
Monday, March 25, 2024, 11 a.m.–11:30 a.m. ET
Durham, NC, United States

8 November 2023
GRC
GRC
Environment, Safety, and Health Annual Review
Wednesday, Nov. 8, 2023, 8 a.m.–6 p.m. PT
Durham, NC, United States

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450

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